WebJun 13, 2024 · Wafer Cassettes 300mm FOUP Inserts Wafer Presenters and Flippers Wafer Transfers and Movers Wafer Aligners Mechanical Handling Vacuum Handling Breeze™ Handling . Post on 13-Jun-2024. 21 views. Category: Documents. 1 download. Report. Download; Facebook. Twitter. Web• Compliance: SEMI, S2, S8, CE, and F47 compliant. • Bridge Tool: 200mm wafer operation (with insert @ 10mm pitch). Additional Key Features • Carrier ID R/W at dock and undock • Twist and Pull FOUP door attach • Twist and Pull center lock FOUP clamp • Servo control/force feedback motion technology • FEOL and BEOL lockout pins
Wafer Presenters Wafer Transfers and Flippers and …...wafer …
WebSep 1, 2003 · Manual FOUP handling capability was assessed. The results indicate that there is no obvious advantage in using any of the two evaluated PGV's over the manual … Web1130 Elkton Dr Colorado Springs CO 80907 Download Product Catalog (PDF) Our Expertise Carbon Fiber formulated for the Semiconductor Industry Precision Glass Target Wafers Wafer Handling Adapters Easily … standard rubber products il
Automatic Door Opener (ADO) – 300mm FOUP Load Port For …
WebThe invention relates to a purge measurement system for FOUPs, which are positioned in a FOUP nest. In addition to at least one free/occupied sensor for the FOUP nest, at least one gas supply and one gas discharge is provided for supplying and discharging flushing gas. At least one pressure sensor, one flow meter, and a controllable valve are arranged in each … WebFOUPs are a specialized plastic carrier designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be transferred between machines for processing or measurement. [3] FOUPs began to appear along with the first 300 mm wafer processing tools in the mid 1990s. WebJul 28, 2016 · The present invention relates to a tray that serves to support a wafer in a front opening unified pod (FOUP) wafer carrier for use in storing and transporting semiconductor wafers. The present invention provides a tray of a FOUP wafer carrier realizes a new concept of a reinforced bar insert tray adopting a structure of inserting a reinforcing bar … standard rsc box